Transparent Ti-doped In2O3 films grown by linear facing target sputtering for organic solar cells
作者： Ju-Hyun Lee , Han-Ki Kim
DOI: 10.3938/JKPS.63.1160
关键词: Annealing (metallurgy) 、 Optoelectronics 、 Energy conversion efficiency 、 Organic solar cell 、 Sputtering 、 Doping 、 Anode 、 Dopant Activation 、 Sheet resistance 、 Materials science
摘要: The electrical, optical, and structural properties of Ti-doped In2O3 (TIO) films grown by linear facing target sputtering (LFTS) were investigated as a function the DC power annealing temperature for use transparent anode in organic solar cells (OSCs). By rapid thermal at 600 °C, we obtained optimized TIO anodes with sheet resistance 26.08 Ohm/square an optical transmittance 84.88%, which are acceptable OSC fabrication. effective Ti dopant activation crystallization film led to reduced resistivity films. fabricated on showed higher conversion efficiency 2.576% compared as-deposited (1.645%) because fill factors OSCs critically depend anode. Successful fabrication indicates that LFTS-grown is promising OSCs.
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