High Mobility Titanium-Doped In2O3 Thin Films Prepared by Sputtering/Post-Annealing Technique
作者： Ryota Hashimoto , Yoshiyuki Abe , Tokio Nakada
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摘要: … (Ti)-doped In2O3 (ITiO) … -thick ITiO thin films were deposited on soda lime glass substrates by rf magnetron sputtering using a 4-in.diameter ceramic target with 1 wt % TiO2 doped In2O3…
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