Birefringence enhancement in annealed TiO2 thin films

摘要: Postdeposition thermal annealing is used to enhance the form birefringence of nanostructured TiO2 thin films grown by electron-beam evaporation using serial bideposition technique. Thin were on fused silica substrates oblique deposition angles between 60° and 75° repetitive 180° substrate rotations produce birefringent that are structurally anisotropic. in air, 200 900°C, was increase changing phase from as-deposited amorphous state a polycrystalline exhibits greater inherent density larger bulk refractive index. The optical properties, microstructure, crystallinity characterized Mueller matrix ellipsometry, scanning electron microscopy, atomic force x-ray diffraction. It found in-plane increased significantly upon annealing, some cases yielding values doubled magn...