A facile process to improve linear birefringence of SiO2 thin films

摘要: Through infiltration of ZrO2 sol into SiO2 columnar thin films, the linear birefringence films is greatly enhanced. Field emission scanning electron microscopy, atomic force particle size analysis and UV–vis–NIR spectrophotometry are employed to characterize morphology, pore size, distribution optical properties sol, respectively. The results indicate that as-deposited porous with a tilted-columnar structure low refractive index. increases deposition angle larger than sol. After filling polarization splitting enlarged. Due loose structure, it decreases an increase in angle. maximum increment transmission difference (ΔT) about ten times film. Infiltrating effective method improve films.