Large-area microfabrication of three-dimensional, helical polymer structures

摘要: A technique has been developed to fabricate polymeric helices with sub-micron dimensions. These are made using a double-templating process, in which an inorganic thin film deposited glancing angle deposition acts as the master. The shape, pitch, handedness and number of turns polymer can be tuned by altering parameters master film. structure this positive is copied into negative intermediate template photoresist, itself for templating helices. This process demonstrated four multifunctional acrylates. master, characterized scanning electron microscopy, energy dispersive x-ray spectroscopy. It shown that large helical microstructures, anchored both thick substrate capping layer, parallel over areas mm2 cm2.