Manufacturing method of radiation detecting apparatus, and radiation detecting apparatus, and radiation imaging system
作者： Chiori Mochizuki , Minoru Watanabe , Takamasa Ishii
DOI:
关键词: Substrate (printing) 、 Electrode 、 Optoelectronics 、 Pixel 、 Matrix Array 、 Radiation 、 Electric signal 、 Radiation imaging 、 Materials science 、 Layer (electronics)
摘要: The object of the invention is to realize a light radiation-detecting apparatus including step preparing matrix array substrate, an insulating layer arranged on plurality pixels layer, wherein pixel includes conversion element converting incident radiation into electric signal, and connection electrode at periphery pixels, fixing flexible supporting member for covering side opposite releasing substrate from array.
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