A new synthesis route of ZnO nanonails via microwave plasma-assisted chemical vapor deposition
作者： M.F. Meléndrez , F. Solis-Pomar , C.D. Gutierrez-Lazos , P. Flores , A.F. Jaramillo
DOI: 10.1016/J.CERAMINT.2015.09.046
关键词: Materials science 、 Thermal decomposition 、 Chemical engineering 、 Chemical vapor deposition 、 Hybrid physical-chemical vapor deposition 、 Sputtering 、 High-resolution transmission electron microscopy 、 Cobalt 、 Substrate (electronics) 、 Zinc 、 Inorganic chemistry
摘要: Abstract In this work, a new method to obtain zinc oxide nanonails (ZnO-NNs) via microwave plasma-assisted chemical vapor deposition (MAP-CVD) is reported. The ZnO-NNs were grown on cobalt seeds using He as the carrier gas. deposited onto alumina at different distances from substrate precursor material sputtering technique. characterized by SEM, TEM, SAED, HRTEM and EDX. NNs growth was uniform surface: stem of these structures ranged between 250 450 nm, cap 25–150 nm, necks 30–200 nm. wide distribution dimensions due thermal decomposition ZnO, which richer in gaseous species Zn than oxygen, leading formation oxygen vacancies. rich triggers direction shank forming NNs, grows [1010]. Some structural experimental aspects are discussed paper.
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