作者: Robert G. Hoover , Rex Hoover
DOI:
关键词: Plunger 、 Optics 、 Fixed position 、 Edge (geometry) 、 Frame (networking) 、 Perpendicular 、 Rotation 、 Engineering
摘要: A system for aligning a mask and product with high precision, featuring means supporting in fixed position adjacent to the so that is movable relative product. The surrounded by rectangular frame. At least one first plunger presses against edge of frame, while two second plungers press where edges are perpendicular. computer-controlled push plate designed frame said at plunger; pushing direction. Two plates move direction plungers. may also be used rotate moving toward plungers, controlled simultaneously other away from computer determine prior alignment; that, achieve proper alignment product, must moved distance, rotated defined amount. then signals distance; distance. If rotation required, signaled