Plastic deformation in Al (Cu) interconnects stressed by electromigration and studied by synchrotron polychromatic X-ray microdiffraction
作者： Kai Chen , N. Tamura , B. C. Valek , K. N. Tu
DOI: 10.1063/1.2952073
关键词: Condensed matter physics 、 X-ray crystallography 、 Plasticity 、 Electromigration 、 Crystallography 、 Materials science 、 Synchrotron radiation 、 Slip (materials science) 、 Deformation (engineering) 、 X-ray 、 Synchrotron
摘要: We report here an in-depth synchrotron radiation based white beam X-ray microdiffraction study of plasticity in individual grains Al (Cu) interconnect during the early stage electromigration. The shows a rearrangement geometrically necessary dislocations (GND) bamboo typed that stage. find about 90percent GNDs are oriented so their line direction is closest to current flow direction. In non-bamboo grains, Laue peak positions shift, indicating rotate. An analysis terms force directions has been carried out and consistent with observed electromigration induced grain rotation bending.
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sci-hub.se 参考文章(26)
Kenneth E. Easterling, David A. Porter, Phase transformations in metals and alloys ,(1981)
S. Vaidya, A.K. Sinha, Effect of texture and grain structure on electromigration in Al-0.5%Cu thin films Thin Solid Films. ,vol. 75, pp. 253- 259 ,(1981) , 10.1016/0040-6090(81)90404-1
J. K. Mackenzie, E. H. Sondheimer, The Theory of the Change in the Conductivity of Metals Produced by Cold Work Physical Review. ,vol. 77, pp. 264- 270 ,(1950) , 10.1103/PHYSREV.77.264
O. Hignette, P. Cloetens, G. Rostaing, P. Bernard, C. Morawe, Efficient sub 100 nm focusing of hard x rays Review of Scientific Instruments. ,vol. 76, pp. 063709- ,(2005) , 10.1063/1.1928191
B. C. Valek, J. C. Bravman, N. Tamura, A. A. MacDowell, R. S. Celestre, H. A. Padmore, R. Spolenak, W. L. Brown, B. W. Batterman, J. R. Patel, Electromigration-induced plastic deformation in passivated metal lines Applied Physics Letters. ,vol. 81, pp. 4168- 4170 ,(2002) , 10.1063/1.1525880
R. A. Sacks, J. E. Robinson, Electrical resistivity of dislocation arrays Physical Review B. ,vol. 13, pp. 611- 620 ,(1976) , 10.1103/PHYSREVB.13.611
Paul S Ho, Thomas Kwok, Electromigration in metals Reports on Progress in Physics. ,vol. 52, pp. 301- 348 ,(1989) , 10.1088/0034-4885/52/3/002
H Bross, O Haberlen, The scattering of electrons by edge dislocations in Al Journal of Physics: Condensed Matter. ,vol. 5, pp. 7687- 7700 ,(1993) , 10.1088/0953-8984/5/41/016
Wenjun Liu, Gene E. Ice, Jonathan Z. Tischler, Ali Khounsary, Chian Liu, Lahsen Assoufid, Albert T. Macrander, Short Focal Length Kirkpatrick-Baez Mirrors for a Hard X-Ray Nanoprobe Review of Scientific Instruments. ,vol. 76, pp. 113701- ,(2005) , 10.1063/1.2125730
N. Tamura, A. A. MacDowell, R. Spolenak, B. C. Valek, J. C. Bravman, W. L. Brown, R. S. Celestre, H. A Padmore, B. W. Batterman, J. R. Patel, Scanning X-ray microdiffraction with submicrometer white beam for strain/stress and orientation mapping in thin films. Journal of Synchrotron Radiation. ,vol. 10, pp. 137- 143 ,(2003) , 10.1107/S0909049502021362