Imaging polished sapphire with atomic force microscopy

摘要: The polished faces of c‐ and r‐oriented single‐crystal sapphire have been studied with an optical deflection‐sensed atomic force microscope using microfabricated cantilevers a fiber optic‐based light source. Images taken repulsive contact forces reveal equally spaced steps. spacing between these steps corresponds the off‐axis angle polishing (∼10 arc‐min). An unidentified large‐scale periodicity (∼1 micron) is also observed. Attractive‐mode images same sample obtained electrostatic forces. This was accomplished by evaporating thin metal film on side cantilever. Charge deposited applying bias to electrode attached back allowing it come equilibrium. These attractive‐mode as mode, but increased amplitude. result implies that features are more than simple topography, possibly correspond regions ...