Modeling the effect of etch holes on ferromagnetic MEMS

作者: Xianwen Fang , Nosang Myung , Ken Nobe , Jack W Judy , None

DOI: 10.1109/20.951259

关键词: CoercivityMagnetic domainEtching (microfabrication)Condensed matter physicsMicromagneticsMaterials scienceEtch pit densityMagnetic structureSurface micromachiningFerromagnetism

摘要: … In this work we report on a theoretical model for the coercivity as a function of etch-hole geometry … If we assume that the coercivity of the perforated sample is proportional to the pinning …

参考文章(9)
H.H. Yang, N.V. Myung, J. Yee, D.-Y. Park, B.-Y. Yoo, M. Schwartz, K. Nobe, J.W. Judy, Ferromagnetic micromechanical magnetometer Sensors and Actuators A-physical. ,vol. 97, pp. 88- 97 ,(2002) , 10.1016/S0924-4247(01)00809-3
J.W. Judy, R.S. Muller, Magnetically actuated, addressable microstructures IEEE\/ASME Journal of Microelectromechanical Systems. ,vol. 6, pp. 249- 256 ,(1997) , 10.1109/84.623114
D.C. Jiles, D.L. Atherton, Theory of ferromagnetic hysteresis Journal of Magnetism and Magnetic Materials. ,vol. 61, pp. 48- 60 ,(1986) , 10.1016/0304-8853(86)90066-1
F. Preisach, Über die magnetische Nachwirkung European Physical Journal. ,vol. 94, pp. 277- 302 ,(1935) , 10.1007/BF01349418
H. Kronmüller, Theory of the coercive field in amorphous ferromagnetic alloys Journal of Magnetism and Magnetic Materials. ,vol. 24, pp. 159- 167 ,(1981) , 10.1016/0304-8853(81)90010-X
H. Wan, G. C. Hadjipanayis, Thickness dependence of coercivity in Co‐Ni thin films Journal of Applied Physics. ,vol. 70, pp. 6059- 6061 ,(1991) , 10.1063/1.350045
A Mechanism of Magnetic Hysteresis in Heterogeneous Alloys Philosophical transactions - Royal Society. Mathematical, physical and engineering sciences. ,vol. 240, pp. 599- 642 ,(1948) , 10.1098/RSTA.1948.0007
J.W. Judy, K. Nobe, M. Schwartz, H. Uang, K. Yang, P. Irazoqui-Pasotr, N. Myung, Ferromagnetic Micromechanical Magnetometers 2000 Solid-State, Actuators, and Microsystems Workshop Technical Digest. ,(2000) , 10.31438/TRF.HH2000A.8