Ferromagnetic micromechanical magnetometer
作者： H.H. Yang , N.V. Myung , J. Yee , D.-Y. Park , B.-Y. Yoo
DOI: 10.1016/S0924-4247(01)00809-3
关键词:
摘要: A novel micromechanical magnetometer has been designed, fabricated, and tested that consists of low-stress electrodeposited hard magnetic alloys surface micromachined polysilicon structures. The sensor responds to applied fields without consuming any power the magnitude response is scale independent. By optically measuring their response, these second-generation sensors can be used detect as small 500 nT experimental performance agree well with theoretical predictions.
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