A miniature vibrating cantilever magnetometer
作者： R. Levy , P. Kayser , S. Masson , B. Bourgeteau , J. Moulin
DOI: 10.1109/DTIP.2015.7161036
关键词:
摘要: This paper presents the preliminary work to demonstrate feasibility of a miniature resonator based magnetometer. magnetometer consists thin film ferromagnetic material sputtered on cantilever with magnetic moment aligned along length cantilever. As vibrates under field, magnetostatic interaction induces torque that stiffens its spring constant thus shifting resonance frequency. principle operation using cobalt-nickel and quartz tuning fork allows developing (0.1mm2), low power (1mW), cost, precise (10nT) magnetometer, machining technology is compatible micromachined inertial MEMS sensor technology. It targeted be included in IMUS accelerometers gyroscopes for guidance navigation applications. First theoretical model presented obtain analytical expressions scale factor resolution sensor. Then sputtering method shown as well characterization field different thicknesses magnetization methods. The realized forks which are films characterized, especially terms supplementary mechanical damping due film. Finally, resonators connected electronic oscillators build prototypes measured resolution.
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