3D Magnetic Field Sensor Concept for Use in Inertial Measurement Units (IMUs)

作者: Dirk Ettelt , Patrice Rey , Guillaume Jourdan , Arnaud Walther , Philippe Robert

DOI: 10.1109/JMEMS.2013.2273362

关键词:

摘要: … sensor that is suitable for co-integration with inertial sensors to form singlechip inertial measurement units… force measurement, our sensor uses permanent magnetic materials and …

参考文章(25)
Ch. Roumenin, K. Dimitrov, A. Ivanov, Integrated vector sensor and magnetic compass using a novel 3D Hall structure Sensors and Actuators A-physical. ,vol. 92, pp. 119- 122 ,(2001) , 10.1016/S0924-4247(01)00549-0
J. M. Chen, N. C. MacDonald, Measuring the nonlinearity of silicon piezoresistance by tensile loading of a submicron diameter fiber using a microinstrument Review of Scientific Instruments. ,vol. 75, pp. 276- 278 ,(2004) , 10.1063/1.1633005
N. M. Dempsey, A. Walther, F. May, D. Givord, K. Khlopkov, O. Gutfleisch, High performance hard magnetic NdFeB thick films for integration into micro-electro-mechanical systems Applied Physics Letters. ,vol. 90, pp. 092509- ,(2007) , 10.1063/1.2710771
F. C. S. da Silva, S. T. Halloran, L. Yuan, D. P. Pappas, A z-component magnetoresistive sensor Applied Physics Letters. ,vol. 92, pp. 142502- ,(2008) , 10.1063/1.2905264
S. S. P. Parkin, K. P. Roche, M. G. Samant, P. M. Rice, R. B. Beyers, R. E. Scheuerlein, E. J. O’Sullivan, S. L. Brown, J. Bucchigano, D. W. Abraham, Yu Lu, M. Rooks, P. L. Trouilloud, R. A. Wanner, W. J. Gallagher, Exchange-biased magnetic tunnel junctions and application to nonvolatile magnetic random access memory (invited) Journal of Applied Physics. ,vol. 85, pp. 5828- 5833 ,(1999) , 10.1063/1.369932
T.B. Gabrielson, Mechanical-thermal noise in micromachined acoustic and vibration sensors IEEE Transactions on Electron Devices. ,vol. 40, pp. 903- 909 ,(1993) , 10.1109/16.210197
J. P. Nozières, S. Jaren, Y. B. Zhang, A. Zeltser, K. Pentek, V. S. Speriosu, Blocking temperature distribution and long-term stability of spin-valve structures with Mn-based antiferromagnets Journal of Applied Physics. ,vol. 87, pp. 3920- 3925 ,(2000) , 10.1063/1.372435
W. H. Meiklejohn, C. P. Bean, New Magnetic Anisotropy Physical Review. ,vol. 105, pp. 904- 913 ,(1956) , 10.1103/PHYSREV.105.904
Byunghoon Bae, Bruce R Flachsbart, Kyihwan Park, Mark A Shannon, Design optimization of a piezoresistive pressure sensor considering the output signal-to-noise ratio Journal of Micromechanics and Microengineering. ,vol. 14, pp. 1597- 1607 ,(2004) , 10.1088/0960-1317/14/12/001
F. Dumas-Bouchiat, L. F. Zanini, M. Kustov, N. M. Dempsey, R. Grechishkin, K. Hasselbach, J. C. Orlianges, C. Champeaux, A. Catherinot, D. Givord, Thermomagnetically patterned micromagnets Applied Physics Letters. ,vol. 96, pp. 102511- ,(2010) , 10.1063/1.3341190