A Horseshoe Micromachined Resonant Magnetic Field Sensor With High Quality Factor
作者： Weiguan Zhang , Joshua En-Yuan Lee
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摘要: We report a magnetic field sensor shaped in the form of horseshoe silicon micromechanical resonator. Through coupling pair resonating tines on one end, we are able to achieve Q 14 400. This benefits sensitivity device, which has linear dependence mechanical displacement that is caused by Lorentz force. The strength density thus inferred from displacement. device measured 4.6 mm/(A·T), agrees well with proposed analytical model. By scaling dimensions lateral size similar other referenced works based principles, model predicts tenfold improvement comparison. enhancement due higher Q, achieved merit novel topology.
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