Frequency-Modulated Lorentz Force Magnetometer With Enhanced Sensitivity via Mechanical Amplification
作者： Mo Li , Sarah Nitzan , David A. Horsley
关键词:
摘要: This letter presents a micromachined silicon Lorentz force magnetometer, which consists of flexural beam resonator coupled to current-carrying beams via microleverage mechanism. The is sensor, measures the magnetic field through resonant frequency shift induced by force, acts as an axial load. Previous frequency-modulated magnetometers suffer from low sensitivity, limited both fabrication restrictions and lack amplification In this letter, mechanism amplifies thereby enhancing sensitivity magnetometer factor 42. device has measured 6687 ppm/(mA $\cdot $ T), two orders magnitude larger than prior state-of-the-art. results agree with analytical model finite-element analysis. stability sensor quality ( ${Q}$ ) 540, can be increased improved vacuum packaging.
harvard.edu
researchgate.net 
sci-hub.se 参考文章(10)
Claus B W Pedersen, Ashwin A Seshia, On the optimization of compliant force amplifier mechanisms for surface micromachined resonant accelerometers Journal of Micromechanics and Microengineering. ,vol. 14, pp. 1281- 1293 ,(2004) , 10.1088/0960-1317/14/10/001
Mo Li, Soner Sonmezoglu, David A. Horsley, Extended Bandwidth Lorentz Force Magnetometer Based on Quadrature Frequency Modulation IEEE\/ASME Journal of Microelectromechanical Systems. ,vol. 24, pp. 333- 342 ,(2015) , 10.1109/JMEMS.2014.2330055
Mo Li, Eldwin J. Ng, Vu A. Hong, Chae H. Ahn, Yushi Yang, Thomas W. Kenny, David A. Horsley, Single-structure 3-axis lorentz force magnetometer with sub-30 nT/√HZ resolution international conference on micro electro mechanical systems. pp. 80- 83 ,(2014) , 10.1109/MEMSYS.2014.6765578
Weiguan Zhang, Joshua En-Yuan Lee, A Horseshoe Micromachined Resonant Magnetic Field Sensor With High Quality Factor IEEE Electron Device Letters. ,vol. 34, pp. 1310- 1312 ,(2013) , 10.1109/LED.2013.2278031
Weiguan Zhang, Joshua E.-Y. Lee, Frequency-based magnetic field sensing using Lorentz force axial strain modulation in a double-ended tuning fork Sensors and Actuators A-physical. ,vol. 211, pp. 145- 152 ,(2014) , 10.1016/J.SNA.2014.01.022
T. R. Albrecht, P. Grütter, D. Horne, D. Rugar, Frequency modulation detection using high‐Q cantilevers for enhanced force microscope sensitivity Journal of Applied Physics. ,vol. 69, pp. 668- 673 ,(1991) , 10.1063/1.347347
Emad Mehdizadeh, Varun Kumar, Siavash Pourkamali, Sensitivity Enhancement of Lorentz Force MEMS Resonant Magnetometers via Internal Thermal-Piezoresistive Amplification IEEE Electron Device Letters. ,vol. 35, pp. 268- 270 ,(2014) , 10.1109/LED.2013.2293349
Igor Izyumin, Mitchell Kline, Yu-Ching Yeh, Burak Eminoglu, Bernhard Boser, A 50 µW, 2.1 mdeg/s/√Hz frequency-to-digital converter for frequency-output MEMS gyroscopes european solid-state circuits conference. pp. 399- 402 ,(2014) , 10.1109/ESSCIRC.2014.6942106
J. Lenz, S. Edelstein, Magnetic sensors and their applications IEEE Sensors Journal. ,vol. 6, pp. 631- 649 ,(2006) , 10.1109/JSEN.2006.874493
T.A. Roessig, R.T. Howe, A.P. Pisano, J.H. Smith, Surface-micromachined resonant accelerometer Sensors. ,vol. 2, pp. 859- 862 ,(1997) , 10.1109/SENSOR.1997.635237