作者: Mo Li , Soner Sonmezoglu , David A. Horsley
DOI: 10.1109/JMEMS.2014.2330055
关键词: Magnetic field 、 Optics 、 Electrical engineering 、 Noise floor 、 Frequency modulation 、 Oscillation 、 Resonator 、 Lorentz force 、 Lorentz covariance 、 Magnetometer 、 Physics
摘要: In this paper, a Lorentz force magnetometer demonstrates quadrature frequency modulation operation. The consists of conventional 3-port resonator, which is put into oscillation by electrostatic driving and sensing. bias current flowing through the resonator proportional to displacement, generates in with force. As result, acts as an equivalent spring magnetic field can be measured reading change frequency. sensor has sensitivity 500 Hz/T short-term noise floor nT $\surd $ Hz. bandwidth increased 50 Hz, factor 12 greater than that same operating amplitude-modulated mode. within 50-Hz comparable CMOS Hall-effect sensors.