Frequency-based magnetic field sensing using Lorentz force axial strain modulation in a double-ended tuning fork
作者： Weiguan Zhang , Joshua E.-Y. Lee
DOI: 10.1016/J.SNA.2014.01.022
关键词: Resonator 、 Quality (physics) 、 Physics 、 Tuning fork 、 Lorentz force 、 Acoustics 、 Modulation 、 Magnetic field 、 Electronic engineering 、 Field (physics) 、 Sensitivity (control systems)
摘要: Abstract This paper presents a frequency-based silicon micromechanical resonant magnetic field sensor with high quality factor by using double-ended tuning fork (DETF). The sensing mechanism is based on the detection of frequency shift DETF resonator due to exertion Lorentz force generated under presence field. By designing strain-sensitive as DETF, we are able achieve (Q) over 100,000 for anti-phase mode. An analytical and finite element (FE) model describing sensitivity presented. Good agreement between FE measurements obtained, which close estimates. Through more careful choice device physical dimensions, show that current 215.74 ppm/T can be improved tenfold. Given this level sensitivity, envisage noise floor levels in μT range achievable concepts described paper.
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