Micromachined CMOS magnetic field sensor with ferromagnetic actuation

摘要: In this paper we intend to introduce a new magnetic field sensor. The sensing principle is based on the deformation of mechanical structure due forces, using ferromagnetic materials. Thus sensor can be classified in passive category and exhibits very low power consumption, only conditioning circuit. designed for monolithic integration with CMOS electronics. Post-process fabrication steps are described experimental results, obtained torsion shown. sensitivity compares that highly sensitive Hall plates. A simple analytical model finally given turned into analog VHDL description order fully integrate standard microelectronic design flow.