Dynamic response and shock resistance of ferromagnetic micromechanical magnetometers
作者： J.K. Yee , H.H. Yang , J.W. Judy
DOI: 10.1109/MEMSYS.2002.984264
关键词:
摘要: We have designed, fabricated, and tested ferromagnetic micromechanical magnetometers and have characterized their dynamic response and shock resistance. The magnetometer …
sci-hub.se 参考文章(8)
H.H. Yang, N.V. Myung, J. Yee, D.-Y. Park, B.-Y. Yoo, M. Schwartz, K. Nobe, J.W. Judy, Ferromagnetic micromechanical magnetometer Sensors and Actuators A-physical. ,vol. 97, pp. 88- 97 ,(2002) , 10.1016/S0924-4247(01)00809-3
Feixia Pan, Joel Kubby, Eric Peeters, Alex T Tran, Subrata Mukherjee, Squeeze film damping effect on the dynamic response of a MEMS torsion mirror Journal of Micromechanics and Microengineering. ,vol. 8, pp. 200- 208 ,(1998) , 10.1088/0960-1317/8/3/005
Yao-Joe Yang, M.-A. Gretillat, S.D. Senturia, Effect of air damping on the dynamics of nonuniform deformations of microstructures Sensors. ,vol. 2, pp. 1093- 1096 ,(1997) , 10.1109/SENSOR.1997.635390
J.E. Lenz, A review of magnetic sensors Proceedings of the IEEE. ,vol. 78, pp. 973- 989 ,(1990) , 10.1109/5.56910
Raymond Jefferson Roark, Warren C Young, Roark's Formulas for Stress and Strain ,(1938)
W.N. Sharpe, K.M. Jackson, K.J. Hemker, Z. Xie, Effect of specimen size on Young's modulus and fracture strength of polysilicon IEEE\/ASME Journal of Microelectromechanical Systems. ,vol. 10, pp. 317- 326 ,(2001) , 10.1109/84.946774
V. T. Srikar, S. D. Senturia, The Design and Analysis of Shock Resistant Microsystems (MEMS) Springer, Berlin, Heidelberg. pp. 1342- 1345 ,(2001) , 10.1007/978-3-642-59497-7_316
Y.-J. Yang, S.D. Senturia, Numerical Simulation of Compressible Squeezed-Film Damping 1996 Solid-State, Actuators, and Microsystems Workshop Technical Digest. ,(1996) , 10.31438/TRF.HH1996.18