Crystallization of HfO2 in InAs/HfO2 core-shell nanowires.
作者： T Rieger , T Jörres , J Vogel , A Biermanns , U Pietsch
DOI: 10.1088/0957-4484/25/40/405701
关键词: Molecular beam 、 Nanotechnology 、 Monoclinic crystal system 、 Transmission electron microscopy 、 Materials science 、 Deposition (phase transition) 、 Nanocrystal 、 Optoelectronics 、 Crystallization 、 Nanowire 、 Amorphous solid
摘要: … We report the impact of deposition parameters on the … This can be achieved by atomic layer deposition (ALD), which is … about InAs NWs being covered by ALD-HfO 2 , but also show …
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