Thermal Stability of Aluminum Doped Zinc Oxide Thin Films
作者： Jin Hua Huang , Rui Qin Tan , Jia Li , Yu Long Zhang , Ye Yang
DOI: 10.4028/WWW.SCIENTIFIC.NET/MSF.685.147
关键词: Transparent conducting film 、 Materials science 、 Thermal stability 、 Ceramic 、 Chemical engineering 、 Thin film 、 Electrical conductor 、 Inorganic chemistry 、 Sputter deposition 、 Doping 、 Zinc
摘要: Transparent conductive oxides are key electrode materials for thin film solar cells. Aluminum doped zinc oxide has become one of the most promising transparent (TCO) because its excellent optical and electrical properties. In this work, aluminum films were prepared using RF magnetron sputtering a 4 at% ceramic target. The thermal stability was studied various physical structural characterization methods. It observed that conductivity deteriorated rapidly unevenly when it heated up to 350 °C. When exposed UV ozone short time before heating up, large area homogeneity significantly improved. present work provided novel method improving durability as electrodes in
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