In-Situ Monitoring of Polyamic Acid Imidization with Microdielectrometry

摘要: The kinetics of the imidization reaction various polyimides used in microelectronic applications have previously been studied by infrared spectroscopy. This paper reports use a new dielectric technique, called Microdielectrometry, to monitor PMDA-ODA polyamic acid films deposited on surface an integrated circuit. Dielectric permittivity and loss factor frequency range 1–1000 Hz were measured with Microdielectrometry probes during imidizations at temperatures between 100 160°C. At below 130°C, remains dispersive even after five hours; whereas higher temperatures, becomes constant less than two hours. dependence indicates that film exhibits weakly dispersiv bulk conductivity varies 3×10−10 5×10 4(Ohm cm)−1, increasing temperature but decreasing degree imidization. relatively high above decreases much more rapidly low values, although changes are still detectable 2.5 Results show significant change rate 120 140°C, clearly observable taking place well nominal one hour cure time.