Structural and optical properties of amorphous and crystalline antimony sulfide thin-films

作者: Matthieu Y. Versavel , Joel A. Haber

DOI: 10.1016/J.TSF.2007.03.043

关键词: AntimonySemiconductorAmorphous solidMaterials scienceCrystalliteChemical engineeringSulfurSulfideSputteringThin filmInorganic chemistry

摘要: Smooth and compact thin films of amorphous and crystalline antimony sulfide (Sb 2 S 3 ) were prepared by radio frequency sputtering of an Sb 2 S 3 target. As-deposited films are …

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