作者: Matthieu Y. Versavel , Joel A. Haber
DOI: 10.1016/J.TSF.2007.03.043
关键词: Antimony 、 Semiconductor 、 Amorphous solid 、 Materials science 、 Crystallite 、 Chemical engineering 、 Sulfur 、 Sulfide 、 Sputtering 、 Thin film 、 Inorganic chemistry
摘要: Smooth and compact thin films of amorphous and crystalline antimony sulfide (Sb 2 S 3 ) were prepared by radio frequency sputtering of an Sb 2 S 3 target. As-deposited films are …