Pull-in analysis of electrically actuated viscoelastic microbeams based on a modified couple stress theory
作者： Jin Zhang , Yiming Fu
DOI: 10.1007/S11012-012-9545-2
关键词: Beam (structure) 、 Mechanics 、 Physics 、 Viscoelasticity 、 Finite element method 、 Voltage 、 Galerkin method 、 Classical mechanics 、 Microbeam 、 Length scale 、 Boundary value problem
摘要: A new beam model is developed for the viscoelastic microbeam based on a modified couple stress which contains only one material length scale parameter. The governing equations of equilibrium together with initial conditions and boundary are obtained by combination basic theory Hamilton’s principle. This then used an electrically actuated microbeam-based MEMS structure. dynamic quasi-static firstly given where axial force created midplane stretching effect also considered. Galerkin method to solve above equation this validated finite element (FEM) when our reduced into elastic case. numerical results show that instantaneous pull-in voltage, durable voltage delay time predicted newly larger (longer) than classical model. comparison between given.
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