Reliability testing of flexible printed circuit-based RF MEMS capacitive switches
作者： Simone Lee , Ramesh Ramadoss , Michael Buck , V.M. Bright , K.C. Gupta
DOI: 10.1016/J.MICROREL.2003.09.002
关键词:
摘要: Abstract In this paper, reliability results of a novel type electrostatically actuated RF MEMS capacitive switches developed by our group are discussed. The test setup used for testing consists the switch under connected in series with resistor. A specified actuation waveform is applied to and voltage across resistor continuously recorded. recorded aids identifying short, open, or stiction failure switch. Further, can be analyzed study degradation, reliability, lifetime characteristics proposed method has been failure, hold-down flexible circuit-based switches. Reliability up 75 million operations carried out
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