Apparatus and method for measuring the roughness of a target material surface based upon the scattering of incident X-ray photons

摘要: An apparatus and method are present which use X-ray fluorescence techniques to determine the roughness of a target surface. The includes an source detector. produces primary photons formed into beam, beam is directed incident upon detector positioned receive scattered by A fraction surface directly proportional determined from number received within predetermined exposure time. output signal energy levels photons. range interest divided segments. computer system receives signals increments corresponding counts associated with segments interest. Following exposure, graph each segment. also reviews peak in photons, determines selected characteristics (e.g., maximum count peak, area under etc.), uses calibration data compute value.