The role of ammonia in atomic layer deposition of tungsten nitride
作者： Atashi B. Mukhopadhyay , Charles B. Musgrave
DOI: 10.1063/1.2721118
关键词: Tungsten nitride 、 Ammonia 、 Nitrogen 、 Ligand 、 Catalysis 、 Inorganic chemistry 、 Atomic layer deposition 、 Tungsten Compounds 、 Chemistry 、 Chemical vapor deposition
摘要: The role of ammonia in atomic layer deposition of tungsten nitride: Applied Physics Letters: Vol 90, No 17 … PJ Hay and WR Wadt, Chem. Phys. https://doi.org/10.1063/1.448800 …
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