Tcct match circuit for plasma etch chambers
作者： Maolin Long , Ricky Marsh , Alex Paterson
DOI:
关键词: Coil tap 、 Node (circuits) 、 Electromagnetic coil 、 Electrical engineering 、 Hybrid coil 、 Inductor 、 Physics 、 Rogowski coil 、 Terminal (electronics) 、 Capacitor
摘要: A match circuit includes the following: a power input coupled to an RF source; inner coil between and terminal of coil, including inductor capacitor in series inductor, connecting circuit, first node being defined circuit; output ground, defining direct pass-through connection ground; outer coil; ground.
google.de 参考文章(25)
Gabriel Bilek, Robert D. Greenway, Richard R. Mett, Ajey Joshi, Impedance-matching network ,(1997)
Joung Kim, Gi Kwon, Hong Kim, Bu Ko, Sung Lee, Hong Byun, Sun Han, Plasma processing apparatus having parallel resonance antenna for very high frequency ,(2002)
Andras Kuthi, Arthur M. Howald, Plasma processor apparatus and method, and antenna ,(2002)
Bradley O. Stimson, Kenneth Smyth, Praburam Gopalraja, Use of variable impedance having rotating core to control coil sputter distribution ,(1999)
James A. Moore, Self isolating high frequency saturable reactor ,(1996)
Andras Kuthi, Andrew D. Bailey, Arthur M. Howald, Apparatus and methods for improving the stability of RF power delivery to a plasma load ,(2004)
Richard Parsons, Wayne L. Johnson, Electrical impedance matching system and method ,(1998)
Richard C. Looke, David F. Sorrells, Gregory S. Rawlins, Charley D. Moses, Michael J. Bultman, Michael W. Rawlins, Robert W. Cook, Apparatus, system, and method for up-converting electromagnetic signals ,(2004)
Richard C. Looke, David F. Sorrells, Gregory S. Rawlins, Charley D. Moses, Michael J. Bultman, Martin R. Johnson, Jamison L Young, Michael W. Rawlins, Robert T. Short, Jonathan S. Jensen, Robert W. Cook, DC offset, re-radiation, and I/Q solutions using universal frequency translation technology ,(2005)