A comparison between voltage waveforms to enhance the lifetime of MEMS switch
作者： C. H. Lai , Wallace S. H. Wong
DOI: 10.1109/IECON.2011.6119629
关键词: Voltage 、 Microelectromechanical systems 、 Switching time 、 Sensitivity (control systems) 、 Limiting 、 Dielectric 、 Reliability (semiconductor) 、 Electrical engineering 、 Engineering 、 Waveform 、 Electronic engineering
摘要: Dielectric charging and mechanical bouncing are two vital lifetime limiting factors of RF MEMS switches. Among the numerous approaches to improve reliability switch, tailoring applied actuation voltage waveform is an approach that does not require physical changes switch design. This paper compares performance different waveforms in terms their capability reducing dielectric contact bouncing, sensitivity variations, resulting switching speed complexity implementation.
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