Control of Bouncing in MEMS Switches Using Double Electrodes

摘要: This paper presents a novel way of controlling the bouncing phenomenon commonly present in Radio Frequency Microelectromechanical Systems (RF MEMS) switches using double-electrode configuration. The discusses modeling both lumped parameter and beam models. simulations its control are discussed. Comparison between new proposed method other available techniques is also made. Galerkin applied on model accounting for nonlinear electrostatic force, squeeze film damping, surface contact effect. results indicate that it possible to reduce hence degradation, by use double electrodes.