Contact Bounce Phenomena in a MEM Switch

摘要: Contact bounces are usually erratic and undesirable phenomena that greatly affect the lifetime reliability of electrical contacts. This paper deals with bounce experimentally observed during DC contact make break in a MEM switch. In such device, bouncing behavior cannot be explained by inertia forces far lower from those existing macroscopic relays. Therefore this study aims at providing better understanding nanometer scale. Experiments have been performed nano-indenter an Atomic Force Microscope (AFM), both used to actuate well controlled electrode velocity. Multiple voltage transients several tens ms when make/break operations extremely low velocity (few nm/s). occurs distance between electrodes is order 10nm. A simple analysis static balance shows electrostatic force becomes predominant scale, result competition restoring mobile contact. highlights MEMS switch minimal actuation (here 1µm/s) required prevent contacts bouncing.