Observation and Understanding of the Initial Unstable Electrical Contact Behaviors

摘要: Reliable and long-lifetime electrical contact is a very important issue in the field of radio frequency microelectromechanical systems (MEMS) energy transmission applications. In this paper, initial unstable phenomena under conditions micro-newton-scale force nanometer-scale gap have been experimentally observed. The repetitive bounces at nanoscale are confirmed by measured instantaneous waveforms voltage. Moreover, corresponding physical model for describing competition between electrostatic restoring mobile present. Then, dynamic process closure explicitly calculated with numerical method. Finally, effects spring rigidness open voltage on behaviors investigated theoretically. This paper highlights that MEMS switch, minimal actuation velocity required to prevent mechanical bounce excessive wear.