Hot switching damage mechanisms in MEMS contacts—evidence and understanding
作者： Anirban Basu , Ryan P Hennessy , George G Adams , Nicol E McGruer
DOI: 10.1088/0960-1317/24/10/105004
关键词:
摘要: … that the mechanisms leading to contact erosion operate when the … tunneling. Under this scenario, the separation between the contacts has to be small enough to allow direct tunneling. …
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