Measurement of adhesion forces between polycrystalline silicon surfaces via a MEMS double-clamped beam test structure
作者： G H Li , I Laboriante , F Liu , M Shavezipur , B Bush
DOI: 10.1088/0960-1317/20/9/095015
关键词:
摘要: An electrostatically actuated double-clamped beam test structure has been designed and fabricated for the quantitative determination of adhesion forces between two contacting polycrystalline silicon (polysilicon) surfaces. The experimental measurements profile at varied bias simulations based on finite element methods are combined to evaluate more accurately experienced polysilicon In particular, electrostatic force pull-off is obtained by measuring voltage through optical interferometric methods. then determined from mechanical restoring calculated force. results show a weak scaling with apparent contact area, defined via microfabricated dimples.
sci-hub.se 参考文章(28)
C.H. Mastrangelo, Adhesion-related failure mechanisms in micromechanical devices Tribology Letters. ,vol. 3, pp. 223- 238 ,(1997) , 10.1023/A:1019133222401
Roya Maboudian, W. Robert Ashurst, Carlo Carraro, Tribological Challenges in Micromechanical Systems Tribology Letters. ,vol. 12, pp. 95- 100 ,(2013) , 10.1023/A:1014044207344
X. Rottenberg, I. De Wolf, B.K.J.C. Nauwelaers, W. De Raedt, H.A.C. Tilmans, Analytical Model of the DC Actuation of Electrostatic MEMS Devices With Distributed Dielectric Charging and Nonplanar Electrodes IEEE\/ASME Journal of Microelectromechanical Systems. ,vol. 16, pp. 1243- 1253 ,(2007) , 10.1109/JMEMS.2007.899334
Roya Maboudian, Roger T Howe, Critical Review: Adhesion in surface micromechanical structures Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. ,vol. 15, pp. 1- 20 ,(1997) , 10.1116/1.589247
Sumit Majumder, N.E. McGruer, George G. Adams, P.M. Zavracky, Richard H. Morrison, Jacqueline Krim, Study of contacts in an electrostatically actuated microswitch Sensors and Actuators A-physical. ,vol. 93, pp. 19- 26 ,(2001) , 10.1016/S0924-4247(01)00627-6
D. Roodenburg, J. W. Spronck, H. S. J. van der Zant, W. J. Venstra, Buckling beam micromechanical memory with on-chip readout Applied Physics Letters. ,vol. 94, pp. 183501- ,(2009) , 10.1063/1.3129195
Frank W. DelRio, Martin L. Dunn, Leslie M. Phinney, Chris J. Bourdon, Maarten P. de Boer, Rough surface adhesion in the presence of capillary condensation Applied Physics Letters. ,vol. 90, pp. 163104- ,(2007) , 10.1063/1.2723658
Xiaojie Xue, Andreas A. Polycarpou, Leslie M. Phinney, Measurement and Modeling of Adhesion Energy Between Two Rough Microelectromechanical System (MEMS) Surfaces Journal of Adhesion Science and Technology. ,vol. 22, pp. 429- 455 ,(2008) , 10.1163/156856108X305570
Haosheng Chen, Jiang, Darong Chen, A new method to measure adhesion and surface forces using a closed-loop accelerometer Journal of Adhesion Science and Technology. ,vol. 20, pp. 307- 318 ,(2006) , 10.1163/156856106776381785
Fang Liu, Ian Laboriante, Brian Bush, Christopher S. Roper, Carlo Carraro, Roya Maboudian, In situ studies of interfacial contact evolution via a two-axis deflecting cantilever microinstrument Applied Physics Letters. ,vol. 95, pp. 131902- ,(2009) , 10.1063/1.3238282