Linearization and tunability improvement of MEMS capacitors using flexible electrodes and nonlinear structural stiffness

摘要: This paper proposes solutions for high nonlinearity and structural instability in electrostatically actuated MEMS capacitors. The proposed designs use the flexibility of moving electrode nonlinear stiffness to control characteristic capacitance–voltage (C–V) response. plate displacements are selectively constrained by mechanical stoppers prevent sudden jumps capacitance eliminate pull-in. A symmetric double-humped shape is utilized which results a fairly constant sensitivity C–V curve therefore linearized An analytical finite-element coupled-field model developed study behavior capacitors optimize their design maximum linearity. experimental verify that introduced this improve linearity response increase tunability three times compared conventional parallel-plate At same time, they also pull-in hysteresis