Development of novel segmented-plate linearly tunable MEMS capacitors

摘要: In this paper, novel MEMS capacitors with flexible moving electrodes and high linearity tunability are presented. The plate is divided into small rigid segments connected to one another by connecting beams at their end nodes. Under each node there a step which selectively limits the vertical displacement of node. A lumped model developed analytically solve governing equations coupled structural-electrostatic physics mechanical contact. Using analytical solver, an optimization program finds best set heights that provides highest linearity. Analytical finite element analyses two three-segmented- six-segmented-plate confirm segmentation technique considerably improves while remains as conventional parallel-plate capacitor. Moreover, since new designs require customized fabrication processes, demonstrate applicability proposed for standard modified capacitor steps designed PolyMUMPs introduced. Dimensional design results in combination tunability. Constraining can be extended more complex geometries obtain smooth highly linear responses.