Design and Modelling of Novel Linearly Tunable Capacitors
作者： Mohammad Shavezipur , Amir Khajepour , Seyed Mohammad Hashemi
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摘要: MEMS-based tunable capacitors with electrostatic actuation are well-known for their wide tuning ranges, high Q-factors, fast responses, and small sizes. However, exhibit very sensitivity near pull-in voltage which counters the concept of tunability. In this research, two novel designs presented that improve in capacitance-voltage (C-V) curve. first design, nonlinear deformation supporting beams is studied to develop a new spring. The variable stiffness coefficients such springs linearity C-V curve, by delaying pull-in, maximum tunability also increased without using complex geometries. second an asymmetric non-parallel-plate capacitor introduced, response has lower at voltages. design can be applied highly maintain numerical results demonstrate low designs.Copyright © 2006 ASME
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sci-hub.se 参考文章(8)
Ching-Liang Dai, Mao-Chen Liu, Yu-Ren Li, A linearly tunable capacitor fabricated by the post-CMOS process Smart Sensors, Actuators, and MEMS II. ,vol. 5836, pp. 642- 648 ,(2005) , 10.1117/12.607723
Shimul C. Saha, Ulrik Hanke, Trond Sæther, Modeling, design and simulation of tunable band pass filter using RF MEMS capacitance and transmission line Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series. ,vol. 6035, ,(2005) , 10.1117/12.638511
Zhixiong Xiao, Wuyong Peng, R.F Wolffenbuttel, K.R Farmer, Micromachined variable capacitors with wide tuning range Sensors and Actuators A-physical. ,vol. 104, pp. 299- 305 ,(2003) , 10.1016/S0924-4247(03)00048-7
Gary D. Gray, Matthew J. Morgan, Paul A. Kohl, Electrostatic actuators and tunable micro capacitors/switches with expanded tuning range due to intrinsic stress gradients Proceedings of SPIE. ,vol. 4981, pp. 202- 213 ,(2003) , 10.1117/12.478172
Seonho Seok, Wonseo Choi, Kukjin Chun, None, A novel linearly tunable MEMS variable capacitor Journal of Micromechanics and Microengineering. ,vol. 12, pp. 82- 86 ,(2002) , 10.1088/0960-1317/12/1/313
FEH Tay, Xu Jun, YC Liang, VJ Logeeswaran, Yao Yufeng, None, The effects of non-parallel plates in a differential capacitive microaccelerometer Journal of Micromechanics and Microengineering. ,vol. 9, pp. 283- 293 ,(1999) , 10.1088/0960-1317/9/4/301
Jinghong Chen, Jun Zou, Chang Liu, José E Schutt-Ainé, S-MK Kang, None, Design and modeling of a micromachined high-Q tunable capacitor with large tuning range and a vertical planar spiral inductor IEEE Transactions on Electron Devices. ,vol. 50, pp. 730- 739 ,(2003) , 10.1109/TED.2003.810479
A J Gallant, D Wood, The modelling and fabrication of widely tunable capacitors Journal of Micromechanics and Microengineering. ,vol. 13, ,(2003) , 10.1088/0960-1317/13/4/326