Electrostatic repulsive out-of-plane actuator using conductive substrate.
作者： Weimin Wang , Qiang Wang , Hao Ren , Wenying Ma , Chuankai Qiu
DOI: 10.1038/SREP35118
关键词: Mechanics 、 Fabrication 、 Actuator 、 Displacement (vector) 、 Deformable mirror 、 Stroke (engine) 、 Voltage 、 Electrical connection 、 Materials science 、 Electrical conductor
摘要: A pseudo-three-layer electrostatic repulsive out-of-plane actuator is proposed. It combines the advantages of two-layer and three-layer actuators, i.e., fabrication requirements fill factor. theoretical model for proposed developed solved through numerical calculation Schwarz-Christoffel mapping. Theoretical simulated results show that offers higher performance than actuators with regard to two most important characteristics namely, driving force stroke. Given structure compatible both parallel-plate these types a 19-element actuated deformable mirror operated in electrical connection mode. experimental demonstrate mode produces larger displacement 0–4.5 μm dc voltage 0–100 V, when compared
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