In situ studies of interfacial contact evolution via a two-axis deflecting cantilever microinstrument
作者： Fang Liu , Ian Laboriante , Brian Bush , Christopher S. Roper , Carlo Carraro
DOI: 10.1063/1.3238282
关键词:
摘要: The time-dependent assessment of two contacting polycrystalline silicon surfaces is realized using a microinstrument that allows for in situ surface analysis. evolution contact resistance, morphology, and chemistry probed as function cycle. Initially, the resistance found to decrease then increase with impact Upon prolonged cycling, fracture Si grains observed which grow form wear crater. electrical, morphological, chemical analyses suggest rough polysilicon due proceeds through three distinct phases, namely plastic deformation asperities, adhesive wear, grain fracture.
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