Stabilization of electrostatic MEMS resonators using a delayed feedback controller
作者： Fadi M Alsaleem , Mohammad I Younis , None
DOI: 10.1088/0964-1726/19/3/035016
关键词:
摘要: We present a study for the stabilization of MEMS resonator actuated with DC and AC voltages using delayed feedback controller. show that controller, careful selection its parameters, can be used to stabilize an originally unstable operating in dynamic pull-in frequency band. Also, controller is shown enhance stability near pull-in, where it experiences strong fractal behavior. In both cases, shows superior performance rejecting disturbances. Experimental theoretical results are presented demonstrate capability capacitive resonator. Good agreement between simulation experiment demonstrated.
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