Low-voltage closed loop MEMS actuators

摘要: An efficient electrostatic resonator is designed by adding a low voltage controller to an actuator. The closed loop actuator shows stable, and bi-sable behaviors with bounded chaotic oscillations as large 117% of the capacitor gap. decreased from previously less than 9 V thereby reducing load on circuit components. Bifurcation diagrams are obtained showing frequency magnitude AC required for develop. information entropy, measure characteristic, calculated micro-resonator found be 0.732.