Static bifurcation and primary resonance analysis of a MEMS resonator actuated by two symmetrical electrodes

摘要: This paper investigates the static and dynamic characteristics of a doubly clamped micro-beam-based resonator driven by two electrodes. The governing equation motion is introduced here, which essentially nonlinear due to its cubic stiffness electrostatic force. In order have deep insight into system, bifurcation analysis Hamiltonian system first carried out obtain sets phase portraits. Static pull-in phenomena are distinguished from viewpoint energy. What follows method multiple scales applied determine response stability for small vibration amplitude AC voltage. Two important working conditions, where origin stable center or an unstable saddle point, considered, respectively, analysis. Results show that can exhibit hardening-type softening-type behavior in neighborhood different equilibrium positions. Besides, attractive linear-like state may also exist under certain parameters if vibrates around origin. Whereafter, corresponding parameter relationships deduced then numerically verified. Moreover, variation equivalent natural frequency analyzed as well. It found later condition increase resonator. Finally, numerical simulations provided illustrate effectiveness theoretical results.