Dynamic analysis and design of electrically actuated viscoelastic microbeams considering the scale effect

摘要: Abstract Viscoelastic phenomena widely exist in MEMS materials, which may have certain effects on quasi-static behaviors and transition mechanism of nonlinear jumping phenomena. The static dynamic a doubly clamped viscoelastic microbeam actuated by one sided electrode are investigated detail, based modified couple stress theory. governing equation motion is introduced here, essentially due to its midplane stretching effect electrostatic force. Through analysis, the equilibrium position, pull-in voltage location system obtained with differential quadrature method finite element method. equivalent geometric parameter presented explain influence scale location. Different from elastic material, there two kinds voltages called as instantaneous durable system. Then, Galerkin discretization multiple scales applied determine response stability for small vibration amplitude. A new perturbation deal term presented. Theoretical expressions about spaces linear-like vibration, hardening-type softening-type then deduced. viscoelasticity behavior studied. Results show that can reduce effective modulus make tend vibration; increase vibration. And most all, simulation results case studies used realize optimization. Then conditions desired many applications, obtained. In this paper, multi-physical field coupling verify theoretical analysis.