A semi-analytical tool based on geometric nonlinearities for microresonator design

摘要: In this paper, a computational mechanics model specifically tailored for composite microresonators with piezoelectric actuation and sensing is developed used as design tool these microresonators. The accounts the structural properties electromechanical coupling effect through finite-element analysis. It assumed that deflection large geometric nonlinearity must be included. dynamic admittance derived by combining linear constitutive equations modal transfer function of multi-layered microresonator structure. resonator receptance matrix constructed summation considering limited number dominant modes. determination at input output ports makes use converse direct effects. development models, boundary conditions, shapes electrodes distributed parameters such varying elastic modulus across length structure have been taken into account. semi-analytical can to carry out parametric studies respect following: (i) beam thickness length, (ii) influence constant axial forces on transverse vibrations clamped–clamped microresonators, (iii) geometry drive sense (iv) imperfect conditions due mask imperfections fabrication procedure. has validated comparing predictions prior results available in literature resonators experimental measurements. A detailed discussion modeling considerations also presented.