High-fidelity modeling of MEMS resonators. Part II. Coupled beam-substrate dynamics and validation

摘要: A computational multiphysics model of the coupled beam-substrate-electrostatic actuation dynamics MEMS resonators has been developed for model-based prediction Q-factor and design sensitivity studies clamped vibrating beam. The substrate resonator beam are modeled independently then integrated by enforcing their interface compatibility condition force equilibrium to arrive at model. present validated with several reported single-beam resonators. indicates that: anchor loss is primarily engendered through coupling between resonant modes waves propagating inner layers; frequency decreases up 5% due flexibilities interacting anchors; and, a given mass its relative compliance respect key parameters that influence degradation. In addition, also used predict paired-beam mechanical filter device high fidelity when compared experimentally observed Q-factor.