A new approach and model for accurate determination of the dynamic pull-in parameters of microbeams actuated by a step voltage

摘要: Accurate determination of pull-in voltage and position is crucial in the design electrostatically actuated microbeam-based devices. In past, there have been many works on analytical modeling static microbeams. However, unlike microbeams where models well established, are few dynamic microbeam by a step voltage. This paper presents two approximate for calculating cantilever beam clamped–clamped beam, respectively. The effects fringing field included models. derived based energy balance method. An N-order algebraic equation derived. solution yields accuracy present verified comparing their results with experimental published available literature.