Design considerations on large amplitude vibration of a doubly clamped microresonator with two symmetrically located electrodes
作者： Jianxin Han , Qichang Zhang , Wei Wang
DOI: 10.1016/J.CNSNS.2014.08.011
关键词:
摘要: Abstract In this paper, a doubly clamped microresonator with two symmetrically located electrodes is investigated to provide some design considerations on large amplitude vibration of type micro-electro-mechanical system (MEMS). The equilibrium points the corresponding Hamiltonian are determined at first. From viewpoint energy, and dynamic pull-in phenomenon explained quantitatively according energy potential barrier/well or homoclinic/heteroclinic orbits, parameter regions derived. Then, first mode assumption classical beam theory introduced study effect physical parameters resonator. Some theoretically obtained then numerically verified. To avoid complicated obtain better performance, Melnikov method applied predict existence chaos. Besides, numerical simulation carried out find stable by using bifurcation diagrams local maximum method. Furthermore, four possible devices designed examine effectiveness approach.
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