Bifurcation Control of an Electrostatically-Actuated MEMS Actuator with Time-Delay Feedback.

摘要: The parametric excitation system consisting of a flexible beam and shuttle mass widely exists in microelectromechanical systems (MEMS), which can exhibit rich nonlinear dynamic behaviors. This article aims to theoretically investigate the jumping phenomena bifurcation conditions class electrostatically-driven MEMS actuators with time-delay feedback controller. Considering comb structure mass, partial differential governing equation is obtained both linear cubic excitation. Then, method multiple scales introduced obtain slow flow that analyzed for stability bifurcation. Results show improve resonance frequency system. What more, through detailed mathematical analysis, discriminant Hopf derived, appropriate force make branch from point stable under any driving voltage value. Meanwhile, global analysis saddle node theoretical expressions about parameter space maximum amplitude monostable vibration are deduced. It found disappearance means emergence vibration. Finally, numerical results confirm analytical prediction.