Effect of coupled modes on pull-in voltage and frequency tuning of a NEMS device

摘要: A dynamic microelectromechanical system and a nanoelectromechanical are designed to operate over desired frequency range. There exist different types of tuning mechanisms such as due the electrostatic softening effect hardening because axial tension. These two effects discussed quite often in many studies. In this paper, we discuss about case where both can be accounted simultaneously obtain tuning. To model effects, take fixed–fixed beam separated by bottom side electrode. Subsequently, solve coupled elasticity equation using Galerkin method frequencies orthogonal modes, namely, in-plane out-of-plane modes. After validating with experimental results available literature, study these modes on pull-in It is found that voltage increased intermodal coupling. The coupling region controlled selecting appropriate gaps between electrodes, respectively.